Title: Effective Electrical Passivation of Ge(100) for HfO2 Gate Dielectric Layers Using O-2 Plasma
Authors: Xie, Qi ×
Deduytsche, Davy
Schaekers, Marc
Caymax, Matty
Delabie, Annelies
Qu, Xin-Ping
Detavernier, Christophe #
Issue Date: 2011
Publisher: The Electrochemical Society
Series Title: Electrochemical and Solid-State Letters vol:14 issue:5 pages:G20-G22
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science