Title: Development of ALD HfZrOx with TDEAH/TDEAZ and H2O
Authors: Shi, X ×
Tielens, H
Takeoka, S
Nakabayashi, T
Nyns, L
Adelmann, C
Delabie, A
Schram, T
Ragnarsson, L
Schaekers, M
Date, L
Schreutelkamp, R
Van Elshocht, S #
Issue Date: 2011
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:158 issue:1 pages:H69-H74
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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