Title: Development of ALD HfZrOx with TDEAH/TDEAZ and H2O
Authors: Shi, X ×
Tielens, H
Takeoka, S
Nakabayashi, T
Nyns, L
Adelmann, C
Delabie, A
Schram, T
Ragnarsson, L
Schaekers, M
Date, L
Schreutelkamp, R
Van Elshocht, S #
Issue Date: 2011
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:158 issue:1 pages:H69-H74
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science