Title: Germanium surface passivation and atomic layer deposition of high-k dielectrics-a tutorial review on Ge-based MOS capacitors
Authors: Xie, Qi ×
Deng, Shaoren
Schaekers, Marc
Lin, Dennis
Caymax, Matty
Delabie, Annelies
Qu, Xin-Ping
Jiang, Yu-Long
Deduytsche, Davy
Detavernier, Christophe #
Issue Date: 2012
Publisher: IOP Pub.
Series Title: Semiconductor Science and Technology vol:27 issue:7
Article number: 074012
ISSN: 0268-1242
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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