ITEM METADATA RECORD
Title: PR and BARC Wet Strip in BEOL Patterning Using a UV-Enabled Aqueous Process
Authors: Kesters, E
Le, Q. T
Lux, M
Vereecke, G
Struyf, H
De Gendt, Stefan #
Issue Date: 2011
Publisher: ELECTROCHEMICAL SOC INC
Host Document: SEMICONDUCTOR CLEANING SCIENCE AND TECHNOLOGY 12 (SCST 12) vol:41 issue:5 pages:269-276
Conference: 12th International Symposium on Semiconductor Cleaning Science and Technology (SCST) during the Fall Meeting of the Electrochemical-Society (ECS) location:Boston: MA date:OCT 10-11, 2011
ISBN: 978-1-60768-259-2
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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