ITEM METADATA RECORD
Title: Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window
Authors: Kim, Tae-Gon
Pacco, Antoine
Wostyn, Kurt
Brems, Steven
Xu, XiuMei
Struyf, Herbert
Arstila, Kai
Vandevelde, B
Park, Jin-Goo
De Gendt, Stefan
Mertens, Paul W
Heyns, Marc #
Issue Date: 2012
Publisher: TRANS TECH PUBLICATIONS LTD
Host Document: ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES X vol:187 pages:123-126
Conference: 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) location:Ostend: BELGIUM date:SEP 20-22, 2010
ISBN: *****************
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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