ITEM METADATA RECORD
Title: The influence of the Angle of Incidence in Megasonic Cleaning
Authors: Brems, Steven
Hauptmann, Marc
Camerotto, Elisabeth
Xu, XiuMei
De Gendt, Stefan
Heyns, Marc
Mertens, Paul #
Issue Date: 2012
Publisher: TRANS TECH PUBLICATIONS LTD
Host Document: ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES X vol:187 pages:163-166
Conference: 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) location:Ostend: BELGIUM date:SEP 20-22, 2010
ISBN: *****************
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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