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Title: Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
Authors: van der Veen, Marleen
Vereecke, Bart
Sugiura, Masahito
Kashiwagi, Yusaku
Ke, Xiaoxing
Cott, Daire
Vanpaemel, Johannes
Vereecken, Philippe
De Gendt, Stefan
Huyghebaert, Cedric
Tökei, Zsolt #
Issue Date: Jun-2012
Publisher: IEEE
Host Document: 2012 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC) vol:1 issue:1 pages:1-4
Conference: IEEE International Interconnect Technology Conference edition:2012 location:San Jose, CA date:4-6 June 2012
ISBN: 978-1-4673-1137-3
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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