ITEM METADATA RECORD
Title: Characterization of Low-k Dielectric Etch Residue on the Sidewall by Chemical Force Microscope
Authors: Kim, Tae-Gon
Quoc Toan Le
Suhard, Samuel
Lux, Marcel
Vereecke, Guy
Claes, Martine
Struyf, Herbert
De Gendt, Stefan
Mertens, Paul W
Heyns, Marc #
Issue Date: 2012
Publisher: TRANS TECH PUBLICATIONS LTD
Host Document: ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES X vol:187 pages:197-200
Conference: 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) location:Ostend: BELGIUM date:SEP 20-22, 2010
ISBN: *****************
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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