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Title: Stroboscopic Schlieren Study of Bubble Formation during Megasonic Agitation
Authors: Hauptmann, Marc
Brems, Steven
Camerotto, Elisabeth
Mertens, Paul W
Heyns, Marc
De Gendt, Stefan
Glorieux, Christ
Lauriks, Walter #
Issue Date: 2012
Publisher: TRANS TECH PUBLICATIONS LTD
Host Document: ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES X vol:187 pages:185-189
Diffusion and Defect Data B, Solid State Phenomena vol:187 pages:185-192
Conference: 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) location:Ostend: BELGIUM date:SEP 20-22, 2010
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) edition:10th location:Ostend, BELGIUM date:SEP 20-22, 2010
Description: proceedings paper
ISBN: *****************
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Surface and Interface Engineered Materials
Molecular Design and Synthesis
# (joint) last author

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