Title: Combinatorial screening of work functions in Ta-C-N/HfO2/Si advanced gate stacks
Authors: Chang, K. -S ×
Green, M. L
Levin, I
De Gendt, Stefan #
Issue Date: 2013
Publisher: Pergamon
Series Title: Scripta Materialia vol:68 issue:5 pages:333-336
ISSN: 1359-6462
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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