Title: MOEMS uniaxial accelerometer based on EpoClad/EpoCore photoresists with built-in fiber clamp
Authors: Guan, Tiannan ×
Keulemans, Grim
Ceyssens, Frederik
Puers, Bob #
Issue Date: 15-Apr-2013
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:193 pages:95-102
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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