Title: Towards Fully Aqueous Ozone Wet Strip of 193 nm Photoresist Stack Using UV Pre-Treatments in Low-k Patterning Applications
Authors: Kesters, E ×
Le, Q. T
Lux, M
Pittevils, J
Vereecke, G
Struyf, H
De Gendt, Stefan #
Issue Date: May-2012
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:159 issue:5 pages:D287-D295
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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