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Title: Transmission electron-microscopy of si3n4/sio2 structures for local oxidation processes
Authors: Vanhellemont, J ×
Claeys, Corneel
Vanlanduyt, J
Declerck, Gilbert
Amelinckx, S
Vanoverstraeten, R #
Issue Date: 1983
Publisher: Expansion sci francaise
Series Title: Institute of physics conference series issue:67 pages:495-500
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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