Title: Study of silicide contacts to SiGe source/drain
Authors: Lauwers, A ×
van Dal, M. J. H
Verheyen, P
Chamirian, O
Demeurisse, C
Mertens, S
Vrancken, C
Verheyden, K
Funk, K
Kittl, Jorge #
Issue Date: 2006
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:83 issue:11-12 pages:2268-2271
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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