Title: New carbon-based thermal stability improvement technique for NiPtSi used in CMOS technology
Authors: Ortolland, C ×
Togo, M
Rosseel, E
Mertens, S
Kittl, Jorge
Absil, P. P
Lauwers, A
Hoffmann, T #
Issue Date: May-2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:5 pages:578-582
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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