Title: Modulation of the effective work function of fully-silicided (FUSI) gate stacks
Authors: Kittl, Jorge ×
Lauwers, A
Pawlak, A. A
Veloso, A
Yu, H. Y
Chang, S. Z
Hoffmann, T
Pourtois, G
Brus, S
Demeurisse, C
Vrancken, C
Absil, P. P
Biesemans, S #
Issue Date: 2007
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:84 issue:9-10 pages:1857-1860
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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