Title: Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition
Authors: Rampelberg, Geert ×
Schaekers, Marc
Martens, Koen
Xie, Qingge
Deduytsche, Davy
De Schutter, Bob
Blasco, Nicolas
Kittl, Jorge
Detavernier, Christophe #
Issue Date: 2011
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:98 issue:16
Article number: ARTN 162902
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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