Title: Improved EOT and leakage current for metal-insulator-metal capacitor stacks with rutile TiO2
Authors: Popovici, Mihaela ×
Kim, Min-Soo
Tomida, Kazuyuki
Swerts, Johan
Tielens, Hilde
Moussa, Alain
Richard, Olivier
Bender, Hugo
Franquet, Alexis
Conard, Thierry
Altimime, Laith
Van Elshocht, Sven
Kittl, Jorge #
Issue Date: Jul-2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:7 pages:1517-1520
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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