Title: Growth and Material Characterization of Hafnium Titanates Deposited by Atomic Layer Deposition
Authors: Popovici, Mihaela ×
Delabie, Annelies
Van Elshocht, Sven
Clima, Sergiu
Pourtois, Geoffrey
Nyns, Laura
Tomida, Kazuyuki
Menou, Nicolas
Opsomer, Karl
Swerts, Johan
Detavernier, Christophe
Wouters, Dirk
Kittl, Jorge #
Issue Date: 2009
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:156 issue:10 pages:G145-G151
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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