Title: A comparative study of the microstructure-dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach
Authors: Popovici, Mihaela ×
Tomida, Kazuyuki
Swerts, Johan
Favia, Paola
Delabie, Annelies
Bender, Hugo
Adelmann, Christoph
Tielens, Hilde
Brijs, Bert
Kaczer, Ben
Pawlak, Malgorzata A
Kim, Min-Soo
Altimime, Laith
Van Elshocht, Sven
Kittl, Jorge #
Issue Date: Aug-2011
Publisher: Wiley-VCH Verlag GMBH
Series Title: Physica Status Solidi A, Applications and Materials Research vol:208 issue:8 pages:1920-1924
ISSN: 1862-6300
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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