Title: Atomic Layer Deposition of Gd-Doped HfO2 Thin Films
Authors: Adelmann, C ×
Tielens, H
Dewulf, D
Hardy, A
Pierreux, D
Swerts, J
Rosseel, E
Shi, X
Van Bael, M. K
Kittl, Jorge
Van Elshocht, S #
Issue Date: 2010
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:157 issue:4 pages:G105-G110
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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