Title: Atomic Layer Deposition of Gadolinium Aluminate using Gd((PrCp)-Pr-i)(3), TMA, and O-3 or H2O
Authors: Adelmann, Christoph ×
Pierreux, Dieter
Swerts, Johan
Dewulf, Dann
Hardy, An
Tielens, Hilde
Franquet, Alexis
Brijs, Bert
Moussa, Alain
Conard, Thierry
Van Bael, Marlies K
Maes, Jan W
Jurczak, Malgorzata
Kittl, Jorge
Van Elshocht, Sven #
Issue Date: Jun-2010
Publisher: Verlag GmbH & Co. KGaA
Series Title: Chemical Vapor Deposition vol:16 issue:4-6 pages:170-178
ISSN: 0948-1907
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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