Title: Direct evidence of linewidth effect: Ni31Si12 and Ni3Si formation on 25 nm Ni fully silicided gates
Authors: Kittl, Jorge ×
Lauwers, A
Demeurisse, C
Vrancken, C
Kubicek, S
Absil, P
Biesemans, S #
Issue Date: 2007
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:90 issue:17
Article number: ARTN 172107
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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