Title: Advanced salicides for 0.10 mu m CMOS: Co salicide processes with low diode leakage and Ti salicide processes with direct formation of low resistivity C54 TiSi2
Authors: Kittl, Jorge ×
Hong, QZ
Yang, H
Yu, N
Samavedam, SB
Gribelyuk, MA #
Issue Date: 1998
Publisher: Elsevier Sequoia
Series Title: Thin Solid Films vol:332 issue:1-2 pages:404-411
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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