|ITEM METADATA RECORD
|Title: ||Salicides: materials, scaling and manufacturability issues for future integrated circuits - (invited)|
|Authors: ||Kittl, Jorge ×|
Miles, D #
|Issue Date: ||Jan-2000 |
|Series Title: ||Microelectronic Engineering vol:50 issue:1-4 pages:87-101|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Non-KU Leuven Association publications|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science