Title: Salicides: materials, scaling and manufacturability issues for future integrated circuits - (invited)
Authors: Kittl, Jorge ×
Shiau, WT
Hong, QZ
Miles, D #
Issue Date: Jan-2000
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:50 issue:1-4 pages:87-101
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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