Title: A model-based approach for process design and its application to the titanium salicide process
Authors: Apte, PP ×
Saxena, S
Rao, SR
Prinslow, DA
Kittl, Jorge
Pollack, GP #
Issue Date: Aug-1998
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Semiconductor Manufacturing vol:11 issue:3 pages:475-485
ISSN: 0894-6507
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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