Title: Materials aspects of Ti and Co silicidation of narrow polysilicon lines
Authors: Kittl, Jorge ×
Hong, QZ #
Issue Date: 1996
Publisher: Elsevier Sequoia
Series Title: Thin Solid Films vol:290 pages:473-476
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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