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Title: Si3n4 mask orientation dependence of local oxidation-induced dislocation generation in silicon
Authors: Vanhellemont, J
Claeys, Corneel
Vanlanduyt, J
Declerck, Gilbert
Amelinckx, S
Vanoverstraeten, R #
Issue Date: 1985
Publisher: Electrochemical soc inc
Host Document: Journal of the electrochemical society vol:132 issue:8 pages:C355-C355
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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