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Title: Electron microscopical analysis of the stacking-fault behavior in inert-gas annealed czochralski silicon
Authors: Bender, H ×
Claeys, Corneel
Vanlanduyt, J
Declerck, Gilbert
Amelinckx, S
Vanoverstraeten, R #
Issue Date: 1983
Publisher: Soc dyers colourists
Series Title: Lecture notes in physics vol:175 pages:134-139
ISSN: 0075-8450
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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