Title: Charge instability of atomic-layer deposited TaSiOx insulators on Si, InP, and In0.53Ga0.47As
Authors: Afanas'ev, Valeri ×
Chou, Hsing-Yi
Nguyen Hoang, Thoan
Adelmann, C
Lin, H. C
Houssa, Michel
Stesmans, Andre #
Issue Date: 2012
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:100 issue:20
Article number: ARTN 202104
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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