Title: A study of the leakage current in TiN/HfO2/TiN capacitors
Authors: Cimino, S ×
Padovani, A
Larcher, L
Afanas'ev, Valeri
Hwang, H. J
Lee, Y. G
Jurczac, M
Wouters, Dirk
Lee, B. H
Hwang, H
Pantisano, L #
Issue Date: Jul-2012
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:95 pages:71-73
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science