ITEM METADATA RECORD
Title: Study of glass frit induced stiction using a micromirror array
Authors: Ling, Fangzhou ×
De Coster, J.
Witvrouw, Ann
Celis, Jean-Pierre
De Wolf, Ingrid #
Issue Date: 2012
Series Title: Microelectronics Reliability vol:52 pages:2256-2260
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Surface and Interface Engineered Materials
Department of Materials Engineering - miscellaneous
Structural Composites and Alloys, Integrity and Nondestructive Testing
× corresponding author
# (joint) last author

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