Title: Ultra-low copper baths for sub-35nm copper interconnects
Authors: Atanasova, Tanya ×
Carbonell, Laureen
Caluwaerts, Rudy
Tokei, Zsolt
Strubbe, Katrien
Vereecken, Philippe #
Issue Date: 2012
Publisher: Electrochemical Society, Inc
Series Title: Electrochemical Society Transactions - ECS Transactions vol:41 issue:35 pages:83-97
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Centre for Surface Chemistry and Catalysis
× corresponding author
# (joint) last author

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