Title: Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes
Authors: Zekry, Joseph ×
Tezcan, Deniz
Cherman, Vladimir
Pedreira, Olalla
Wang, Bo
El Ghannudi, Hamza
Celis, Jean-Pierre
Puers, Bob
Van Hoof, Chris
Tilmans, Harrie #
Issue Date: 2013
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:189 pages:218-232
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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