Title: Quantitative depth profiling of SiGe-multilayers with the Atom Probe
Authors: Koelling, Sebastian ×
Gilbert, Matthieu
Goossens, Jozefien
Hikavyy, Andriy
Richard, Olivier
Vandervorst, Andwilfried #
Issue Date: 2011
Publisher: John Wiley & Sons
Series Title: Surface and Interface Analysis vol:43 issue:1-2 pages:163-166
ISSN: 0142-2421
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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