Title: Miniature absolute optical pressure sensor at a fiber tip for high temperature applications
Authors: Keulemans, Grim
Ceyssens, Frederik
Puers, Bob
Issue Date: 3-Nov-2012
Host Document: Procedia Engineering vol:47 pages:698-701
Conference: Eurosensors edition:26 location:Kraków, Poland date:9-12 September 2012
Abstract: Fiber optic pressure sensors have attracted considerable attention because of their small size, high sensitivity and
immunity to electromagnetic interference. Here, a miniature absolute pressure sensor at the edge of a fiber is
presented. Contradictory to earlier pressure sensors with membranes at the fiber tip (in a co-axial configuration), we
present a sensor in a cross-axial configuration. It is optimized for aerodynamic pressure measurements in turbomachinery.
The sensor is fabricated by thin film deposition techniques and focused ion beam (FIB) microfabrication
and uses multilayer Fabry-Perot (FP) interferometry as sensing principle. The reflected power intensity of the
prototype is experimentally verified to be 0.77%/bar.
ISSN: 1877-7058
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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