Model predictive control of a CVD reactor for production of polysilicon rods
Authors:
Vigano, L Vallerio, Mattia Manenti, F Lima, N M N Linan, L Z Manenti, G
Issue Date:
May-2010
Publisher:
AIDIC
Host Document:
Chemical Engineering Transactions vol:21 pages:523-528
Conference:
13th Conference on Process Integration, Modelling and Optimisation for Energy Saving and Pollution Reduction location:Prague, CZECH REPUBLIC date:28 Aug - 01 Sept 2010
