ITEM METADATA RECORD
Title: Time-resolved monitoring of cavitation activity in megasonic cleaning systems
Authors: Hauptmann, Marc ×
Brems, Steven
Struyf, Herbert
Mertens, Paul
Heyns, Marc
De Gendt, Stefan
Glorieux, Christ #
Issue Date: Mar-2012
Publisher: American Institute of Physics
Series Title: Review of Scientific Instruments vol:83 issue:3 pages:034904-1-034904-11
Article number: 034904
ISSN: 0034-6748
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Acoustics and Thermal Physics Section
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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