Title: High-Damping Carbon Nanotube Hinged Micromirrors
Authors: De Volder, MichaĆ«l ×
De Coster, Jeroen
Reynaerts, Dominiek
Van Hoof, Chris
Kim, Sang-Gook #
Issue Date: Apr-2012
Publisher: Wiley
Series Title: Small vol:8 issue:3 pages:2006-2010
Article number: 10.1002/smll.201102683
Abstract: New developments in digital mirror devices (DMDs) require suspension hinges with a good damping and high temperature stability. Carbon nanotubes (CNTs) offer these unique properties. Herein it is shown how CNT hinges can be integrated in micromirrors. The image illustrates a micromirror with a CNT suspension, and a typical overdamped stepresponse (Q-factor < 0.5).
ISSN: 1613-6810
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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