Title: Plasma polymerization of fluorine alloyed amorphous carbon coatings
Authors: Vanhulsel, A. ×
Dekempeneer, E.
Smeets, J.
Celis, Jean-Pierre #
Issue Date: Jul-1999
Publisher: Published by AVS through the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:17 issue:4 pages:2378-2383
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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