Title: Development and fabrication of a novel photopatternable electric responsive Pluronic hydrogel for MEMS applications
Authors: Guan, Tiannan ×
Godts, Felix
Ceyssens, Frederik
Dubruel, Peter
Neevis, Herc
Puers, Bob #
Issue Date: Oct-2012
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:186 pages:184-190
Abstract: In this paper, we present the controlled swelling of a novel active material for microsystems: a photopatternable electric responsive Pluronic hydrogel. It is very promising as an actuator material in biomedical and microfluidic applications. Upon application of very modest voltages over electrodes in an aqueous environment, it shows a volume swelling of about 400% compared with its initial volume in dry state. We present the synthesis of the novel material, the development of a MEMS compatible fabrication process and measurement results on fabricated test structures.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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