Title: Kinetics of the silicon dioxide growth-process in afterglows of microwave-induced plasmas
Authors: Vinckier, Christiaan ×
Coeckelberghs, P
Stevens, G
Heyns, Marc
Dejaegere, S #
Issue Date: Jan-1987
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:62 issue:4 pages:1450-1458
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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