Title: Investigation of temporary stiction in poly-SiGe micromirror arrays
Authors: Ling, Fangzhou ×
De Coster, J.
Lin, Wan-Yu
Witvrouw, Ann
Celis, Jean-Pierre
De Wolf, Ingrid #
Issue Date: Dec-2012
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:188 pages:320-328
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Surface and Interface Engineered Materials
Sustainable Metals Processing and Recycling
Department of Materials Engineering - miscellaneous
Structural Composites and Alloys, Integrity and Nondestructive Testing
× corresponding author
# (joint) last author

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