Title: On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
Authors: Onsia, Bart ×
Caymax, Matty
Conard, Thierry
De Gendt, Stefan
De Smedt, Frank
Delabie, Annelies
Gottschalk, C.
Green, M.
Heyns, Marc
Lin, S.
Mertens, P.
Tsai, Wilman
Vinckier, Christiaan #
Issue Date: Jan-2005
Publisher: Trans tech publications ltd
Series Title: Diffusion and defect data. Part B, Solid state phenomena vol:103-104 pages:19-22
Description: Ultra clean processing of silicon surfaces VII
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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