Title: A study of the influence of typical wet chemical treatments on the germanium wafer surface
Authors: Onsia, Bart ×
Conard, Thierry
De Gendt, Stefan
Heyns, Marc
Hoflijk, Ilse
Mertens, P.
Meuris, Peter
Raskin, G.
Sioncke, Cornelia
Teerlinck, I.
Theuwis, A.
Van Steenbergen, Jan
Vinckier, Christiaan #
Issue Date: Jan-2005
Publisher: Trans tech publications ltd
Series Title: Diffusion and defect data. Part B, Solid state phenomena vol:103-104 pages:27-30
Description: Ultra clean processing of silicon surfaces VII
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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