Title: VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Authors: Hellin, David ×
Geens, Veerle
Teerlinck, Ivo
Van Steenbergen, Jan
Rip, J
Laureyn, W
Raskin, Geoffroy
Mertens, PW
De Gendt, Stefan
Vinckier, Christiaan #
Issue Date: Jan-2005
Publisher: Trans tech publications ltd
Series Title: Diffusion and defect data. Part B, Solid state phenomena vol:103-104 pages:213-216
Conference: 7th International Symposium on Ultra Clean Processing - UCPSS location:Leuven Belgium date:20/09/04
Description: Ultra clean processing of silicon surfaces VII
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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