7th International Symposium on Ultra Clean Processing - UCPSS, Date: 2004/09/20 - 2004/09/22, Location: Leuven Belgium
Publication date:
2005-01-01
Volume:
103
Pages:
213 -
216
ISSN:
3-908451-06-X, 9783908451068
Publisher:
Trans tech publications ltd
Diffusion and defect data. Part B, Solid state phenomena
Author:
Hellin, David
Geens, Veerle ; Teerlinck, Ivo ; Van Steenbergen, Jan ; Rip, J ; Laureyn, W ; Raskin, Geoffroy ; Mertens, PW ; De Gendt, Stefan ; Vinckier, Christiaan ; Mertens, P ; Meuris, M ; Heyns, M
Keywords:
vpd-dc-txrf, metallic contamination analysis, ge, ray-fluorescence spectrometry, silicon, Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, VPD-DC-TXRF, Ge, RAY-FLUORESCENCE SPECTROMETRY, SILICON, 0204 Condensed Matter Physics, 0912 Materials Engineering, Applied Physics, 4016 Materials engineering