ITEM METADATA RECORD
Title: Photoresist stripping by ozone/water processes: Effect of additives
Authors: Vankerckhoven, Hans ×
De Smedt, Frank
Vandersmissen, Katleen
Claes, M
De Gendt, Stefan
Heyns, MM
Vinckier, Christiaan #
Issue Date: Jan-2005
Publisher: Trans tech publications ltd
Series Title: Ultra clean processing of silicon surfaces vii vol:103-104 pages:309-312
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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