Proceedings of ISMA 2004: International Conference on Noise and Vibration Engineering, Vols 1-8 pages:2347-2360
International Conference on Modal Analysis, Noise and Vibration Engineering Louvain, BELGIUM, SEP 20, 2004-JUL 22, 2005
We discuss the application of an interferometric optical system to the testing and failure analysis of RF MEMS switches. The strengths and weaknesses of the different imaging modes are discussed, and it is proposed that a technique known as the displacement image is very well suited for the investigation of failures in RF MEMS switches. This technique, and its combination with an electronic method to investigate the lifetime of the devices, is illustrated by a number of typical examples.