ITEM METADATA RECORD
Title: Hermeticity testing and failure analysis of MEMS packages
Authors: De Wolf, Ingrid
Jourdain, A
De Moor, P
Tilmans, H. A. C
Marchand, L #
Issue Date: 2007
Publisher: Ieee
Host Document: Ipfa 2007: proceedings of the 14th international symposium on the physical & failure analysis of integrated circuits pages:147-154
Conference: 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits Bangalore, INDIA, JUL 11-13, 2007
ISBN: 978-1-4244-1014-9
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
# (joint) last author

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