14th International Symposium on the Physical and Failure Analysis of Integrated Circuits Bangalore, INDIA, JUL 11-13, 2007, Date: 2007/07/11 - 2007/07/13, Location: INDIA, Bangalore
Publication date:
2007-01-01
Pages:
147 -
154
ISSN:
1424410142, 978-1-4244-1014-9
Publisher:
Ieee; 345 E 47TH ST, NEW YORK, NY 10017 USA
Ipfa 2007: proceedings of the 14th international symposium on the physical & failure analysis of integrated circuits
Author:
De Wolf, Ingrid
Jourdain, A ; De Moor, P ; Tilmans, HAC ; Marchand, L
Keywords:
cavities, sensors, devices, Science & Technology, Technology, Engineering, Electrical & Electronic, Materials Science, Multidisciplinary, Engineering, Materials Science, SENSORS