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Title: Finite element analysis of thermo-elastical modal damping of MEMS vibrations
Authors: Barauskas, R ×
Kausinis, S
De Wolf, Ingrid
Stoffels, Steve
Tilmans, H. A. C #
Issue Date: Apr-2007
Publisher: Public Institution Vibromechanika
Series Title: Journal of Vibroengineering vol:9 issue:2 pages:21-33
Abstract: The paper deals with finite element analysis of damped modal vibrations Q-factor values determined by thermal-elastic damping in micro-electrical-mechanical systems (MEMS). Mathematically the problem is formulated as a complex eigenvalue problem. Verification problems have been solved by using several computational environments and different presentations of model equations in order to comprehend and reduce the influence of rounding errors. The analysis of damped modal properties of selected real MEMS resonator revealed the main features of thermal-elastic damping by taking into account 3D geometry of the resonator and anchoring (clamping) structure.
ISSN: 1392-8716
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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